There are many directions in the field of nanometrology that we could take and a small research group
certainly cannot address all of them. We try to concentrate on quantitative methods in scanning probe microscopy and
related methods, focusing on integration of measurement and numerical analysis methods.
Even if most of the research is project based, we are trying to head all the particular research
topics towards a complex set of methodology for SPM based nanometrology, hoping that the results could be used
also by other researchers. From the main research directions we can select the following:
(c) CMI 2012
2019-10-12 New FDTD solver version GSvit 1.9.2 was released.
We invite you to our SPM workshop.
Image of the month
Contact resonance on Al/Si/Cr calibration sample
Department of nanometrology and technical length
Czech Metrology Institute
Okružní 31, 638 00 Brno