Nanometrology techniques

As it is obvious from these sites, the most widespread tool in the field in nanometrology there are various methods of raster microscopy (SPM - scanning probe microscopy). From the large family of these methods here are the most important which probably have the largest potential in the field of qualitative measurement:

Except these methods we also use techniques like nanoindentation, microindentation and scratch tests, which although do not provide such large spatial resolution but enable to measure forces and mechanical properties in much higher precision.


(c) CMI 2012

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Atomic steps on Si

Contact

Department of nanometrology and technical length
Czech Metrology Institute
Okružní 31, 638 00 Brno
pklapetek(at)cmi.cz